Invention Grant
- Patent Title: Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers
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Application No.: US17728844Application Date: 2022-04-25
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Publication No.: US12252396B2Publication Date: 2025-03-18
- Inventor: Christopher Murray Beard , Song Zheng , John Wesley Hamlin, III , Win-Jae Jessie Yuan , Kelly Jay Taylor , Jose Antonio Martinez Soto
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michelle F. Murray; Frank D. Cimino
- Main IPC: B81C1/00
- IPC: B81C1/00
Abstract:
In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.
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