Invention Grant
- Patent Title: Photodetectors with a deep trench isolation region that includes a bragg mirror
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Application No.: US17507213Application Date: 2021-10-21
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Publication No.: US12266671B2Publication Date: 2025-04-01
- Inventor: Eric Linardy , Eng Huat Toh , Ping Zheng , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H10F39/00 ; H10F39/18

Abstract:
Structures for a photodetector and methods of forming a structure for a photodetector. The structure includes a semiconductor layer having a p-n junction and a deep trench isolation region extending through the semiconductor layer. The deep trench isolation region includes first layers and second layers that alternate with the first layers to define a Bragg mirror. The first layers contain a first material having a first refractive index, and the second layers contain a second material having a second refractive index that is greater than the first refractive index.
Public/Granted literature
- US20230131505A1 PHOTODETECTORS WITH A DEEP TRENCH ISOLATION REGION THAT INCLUDES A BRAGG MIRROR Public/Granted day:2023-04-27
Information query
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