Invention Grant
- Patent Title: Non-volatile memory device with a conductive etch stop layer, method of manufacturing the same, and memory system including the same
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Application No.: US17825076Application Date: 2022-05-26
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Publication No.: US12278201B2Publication Date: 2025-04-15
- Inventor: Moorym Choi , Yunsun Jang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. CHAU & ASSOCIATES, LLC
- Priority: KR10-2021-0138840 20211018
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/00 ; H01L25/00 ; H01L25/18

Abstract:
Provided is a non-volatile memory device including a first structure including a first substrate; a peripheral circuit; a first insulation structure; a plurality of first bonding pads; and a first interconnect structure; a second structure, which includes a conductive etch stop layer; a common source line layer; a stacked structure including alternately stacked gate layers and interlayer insulation layers; a plurality of channel structures penetrating through a cell region of the stacked structure; a second insulation structure; a plurality of second bonding pads; and a second interconnect structure and bonded to the first structure; and a connection layer including a third insulation structure; an input/output via; and an input/output pad, wherein an interface between the second insulation structure and the third insulation structure is disposed at a vertical level between the top surface and the bottom surface of the conductive etch stop layer.
Public/Granted literature
- US20230117267A1 NON-VOLATILE MEMORY DEVICE, METHOD OF MANUFACTURING THE SAME, AND MEMORY SYSTEM INCLUDING THE SAME Public/Granted day:2023-04-20
Information query
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