• Patent Title: MEMS mirror in series with resonant MEMS mirror to redistribute dense pixels
  • Application No.: US17578027
    Application Date: 2022-01-18
  • Publication No.: US12282153B2
    Publication Date: 2025-04-22
  • Inventor: Daniel Adema
  • Applicant: GOOGLE LLC
  • Applicant Address: US CA Mountain View
  • Assignee: GOOGLE LLC
  • Current Assignee: GOOGLE LLC
  • Current Assignee Address: US CA Mountain View
  • Main IPC: G02B26/08
  • IPC: G02B26/08 G02B26/10 G02B27/01
MEMS mirror in series with resonant MEMS mirror to redistribute dense pixels
Abstract:
A near-eye display system employs a low-amplitude, low-frequency micro-electromechanical system (MEMS) mirror in series with a higher-amplitude, higher-frequency resonant MEMS mirror to rotate at a reduced amplitude and frequency with respect to the resonant MEMS mirror redistribute illumination pulses or pixels at the extents of a sinusoidal angular scan pattern of the resonant MEMS mirror.
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