Invention Grant
- Patent Title: Three-dimensional memory device containing templated crystalline ferroelectric memory elements and method of making thereof
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Application No.: US17809758Application Date: 2022-06-29
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Publication No.: US12289889B2Publication Date: 2025-04-29
- Inventor: Kartik Sondhi , Adarsh Rajashekhar , Fei Zhou , Raghuveer S. Makala
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H10B51/30

Abstract:
A ferroelectric memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening extending vertically through the alternating stack and including laterally-protruding portions at levels of the electrically conductive layers, and a memory opening fill structure located in the memory opening and containing a vertical semiconductor channel and a vertical stack of discrete ferroelectric memory structures located in the laterally-protruding portions of the memory opening. Each of the ferroelectric memory structures includes crystalline ferroelectric material portion and a crystalline template material portion located between a respective electrically conductive layer of the electrically conductive layers and the crystalline ferroelectric material portion.
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