• Patent Title: Bolometer having an alignment layer of carbon nanotubes and method for manufacturing same
  • Application No.: US17612325
    Application Date: 2020-05-21
  • Publication No.: US12292336B2
    Publication Date: 2025-05-06
  • Inventor: Ryota YugeNoriyuki Tonouchi
  • Applicant: NEC Corporation
  • Applicant Address: JP Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2019-096953 20190523
  • International Application: PCT/JP2020/020123 WO 20200521
  • International Announcement: WO2020/235636 WO 20201126
  • Main IPC: G01J5/22
  • IPC: G01J5/22
Bolometer having an alignment layer of carbon nanotubes and method for manufacturing same
Abstract:
An object of the present invention is to provide a bolometer having a high TCR value and a low resistance, and a method for manufacturing the infrared sensor. One aspect of the present embodiment relates to a bolometer comprising: a substrate; a first electrode on the substrate; a second electrode spaced from the first electrode on the substrate; and a carbon nanotube layer electrically connected to the first electrode and the second electrode, wherein the carbon nanotube layer comprises 90% by mass or more of semiconducting carbon nanotubes based on the total amount of carbon nanotubes, and the carbon nanotube layer has an alignment satisfying: fx/fy≥2 where an integrated value f of amplitudes of frequencies from −1 μm−1 to +1 μm−1 in one direction from the center is calculated in an image obtained by performing two-dimensional fast Fourier transform processing on an SEM image of the carbon nanotube layer, and an integrated value for a direction x in which the integrated value f becomes maximum is defined as fx and an integrated value for a direction y perpendicular to the direction x is defined as fy.
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