发明申请
US20010010360A1 Thermal infrared detector provided with shield for high fill factor
有权
热红外探测器提供了高填充因子的屏蔽
- 专利标题: Thermal infrared detector provided with shield for high fill factor
- 专利标题(中): 热红外探测器提供了高填充因子的屏蔽
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申请号: US09771879申请日: 2001-01-30
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公开(公告)号: US20010010360A1公开(公告)日: 2001-08-02
- 发明人: Naoki Oda
- 优先权: JP2000-022862 20000131
- 主分类号: G01J005/02
- IPC分类号: G01J005/02 ; C23F001/00
摘要:
An infrared photosensitive area is constituted by an infrared ray absorbing part that is heated by infrared rays, a thermal detector that detects the temperature change of the infrared ray absorbing part, and electrodes that are electrically connected to the thermal detector. The infrared photosensitive area is held up above one surface of a substrate by supports. The electrodes of the infrared photosensitive area are electrically connected to contact pads on the substrate by wiring material that constitutes the support. A shield projects from portions of the infrared ray absorbing part other than portions that correspond to the electrodes. The contact pads of the substrate and the surfaces of the electrodes and the supports that are directed away from the substrate are covered by the shield with an interposed space. This configuration enables an increase in the fill factor of the picture elements of the thermal infrared detector and enables greater absorption of infrared light.
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