发明申请
US20010022693A1 Pattern reading apparatus 失效
图案阅读器

  • 专利标题: Pattern reading apparatus
  • 专利标题(中): 图案阅读器
  • 申请号: US09821017
    申请日: 2001-03-30
  • 公开(公告)号: US20010022693A1
    公开(公告)日: 2001-09-20
  • 发明人: Tuyoshi Ishikawa
  • 申请人: ASAHI KOGAKU KOGYO KABUSHIKI KAISHA
  • 申请人地址: JP Tokyo
  • 专利权人: ASAHI KOGAKU KOGYO KABUSHIKI KAISHA
  • 当前专利权人: ASAHI KOGAKU KOGYO KABUSHIKI KAISHA
  • 当前专利权人地址: JP Tokyo
  • 优先权: JPHEI8-241112 19960823; JPHEI8-301076 19961025; JPHEI8-342775 19961206; JPHEI8-342776 19961206; JPHEI8-342777 19961206; JPHEI8-342778 19961206; JPHEI9-65333 19970304; JPHEI9-65334 19970304; JPHEI9-74497 19970311; JPHEI9-134312 19970508; JPHEI9-165422 19970606
  • 主分类号: G02B003/00
  • IPC分类号: G02B003/00 G02B007/00
Pattern reading apparatus
摘要:
A pattern reading apparatus reads a pattern from a reflective object. The pattern reading apparatus includes a minute-area light source, an objective lens system, an imaging lens, and an imaging element. The objective lens system causes the illumination light beam from the light source to be incident on the object and converges the light beam reflected from the object. The imaging lens forms an image of the object using only a scattered component of light which has been reflected from the object. The imaging element is positioned such that the image of the pattern is imaged for reading the pattern. A shift mechanism is provided for supporting the objective lens for movement parallel to a direction approximately perpendicular to the optical axis of the objective lens.
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