• Patent Title: Composite self-aligned extraction grid and in-plane focusing ring, and method of manufacture
  • Application No.: US09778316
    Application Date: 2001-02-06
  • Publication No.: US20010024920A1
    Publication Date: 2001-09-27
  • Inventor: Kevin W. TjadenTerry N. Williams
  • Main IPC: H01J009/02
  • IPC: H01J009/02 H01J001/30
Composite self-aligned extraction grid and in-plane focusing ring, and method of manufacture
Abstract:
A field emission display having a base plate which has a focus ring structure substantially planar with the extraction grid. The field emission display base plate is fabricated on a substrate having a cathode including an emitter tip formed thereon by depositing a first insulating layer, a first conductive layer over the first insulating layer, etching the first conductive layer, depositing a second insulating layer over the etched first conductive layer, and depositing a second conductive or focus ring layer over the second insulating layer. A second selective etching may be formed to further define the gate and focus ring structures.
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