Invention Application
- Patent Title: Detector with frequency converting coating
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Application No.: US09891928Application Date: 2001-06-25
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Publication No.: US20010040905A1Publication Date: 2001-11-15
- Inventor: Uwe Stamm , Hans-Stephan Albrecht , Uwe Leinhos , Wolfgang Zschocke
- Applicant: Lambda Physik AG
- Applicant Address: null
- Assignee: Lambda Physik AG
- Current Assignee: Lambda Physik AG
- Current Assignee Address: null
- Main IPC: H01S003/13
- IPC: H01S003/13

Abstract:
An ultraviolet light detection system is provided wherein a dark current background growth rate with total accumulated exposure dose is avoided, and parameters of an ultraviolet radiation source such as an ArF-excimer laser may be monitored without rapid degradation of the signal by the superposition of the dark current background over a desired signal. The invention provides a detector including a light sensitive element having a frequency conversion coating on its surface. The coating is preferably directly on the light sensitive element, absorbing incident ultraviolet light and re-emitting visible light in a direction toward the light sensitive element. The coating minimizes a dark current background that would otherwise appear when incident ultraviolet light impinges directly upon the light sensitive element, and thereby extends a lifetime of the light sensitive element. The detector is useful for detecting a wide range of ultraviolet wavelengths, and is particularly useful in solving the dark current growth rate with total accumulated exposure dose problem associated with detecting incident radiation under 240 nm.
Public/Granted literature
- US06389048B2 Detector with frequency converting coating Public/Granted day:2002-05-14
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