A microfluidic device adapted for use with a power source is disclosed. The device includes a substrate and a heater member. The substrate and heater member form a first portion. A second portion is formed adjacent to the first portion. The second portion includes a high activating power polymer portion, at least one resin layer and a shield member. The second portion is selectively shaped to form a thermal expansion portion. A diaphragm member encapsulates the thermal expansion portion so that when power is applied to the heater portion, the high activating power polymer expands against the diaphragm member, causing the diaphragm member to deflect. This device is adapted for use as a microactuator or a blocking microvalve.