Invention Application
US20020058209A1 Method of fabricating capillary discharge plasma display panel using lift-off process 失效
使用剥离工艺制造毛细管放电等离子体显示面板的方法

Method of fabricating capillary discharge plasma display panel using lift-off process
Abstract:
A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.
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