Invention Application
US20020058209A1 Method of fabricating capillary discharge plasma display panel using lift-off process
失效
使用剥离工艺制造毛细管放电等离子体显示面板的方法
- Patent Title: Method of fabricating capillary discharge plasma display panel using lift-off process
- Patent Title (中): 使用剥离工艺制造毛细管放电等离子体显示面板的方法
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Application No.: US09885135Application Date: 2001-06-21
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Publication No.: US20020058209A1Publication Date: 2002-05-16
- Inventor: Steven Kim , Geun Young Yeom , Young-Joon Lee
- Applicant: Plasmion Displays LLC.
- Applicant Address: null
- Assignee: Plasmion Displays LLC.
- Current Assignee: Plasmion Displays LLC.
- Current Assignee Address: null
- Main IPC: H01J009/20
- IPC: H01J009/20

Abstract:
A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.
Public/Granted literature
- US06685523B2 Method of fabricating capillary discharge plasma display panel using lift-off process Public/Granted day:2004-02-03
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