Invention Application
US20020066669A1 Facing-targets-type sputtering apparatus and method 失效
面向目标型溅射装置及方法

  • Patent Title: Facing-targets-type sputtering apparatus and method
  • Patent Title (中): 面向目标型溅射装置及方法
  • Application No.: US09998235
    Application Date: 2001-12-03
  • Publication No.: US20020066669A1
    Publication Date: 2002-06-06
  • Inventor: Sadao Kadokura
  • Applicant: FTS Corporation
  • Applicant Address: JP Hachioji-shi
  • Assignee: FTS Corporation
  • Current Assignee: FTS Corporation
  • Current Assignee Address: JP Hachioji-shi
  • Priority: JP369655/2000 20001205
  • Main IPC: C23C014/00
  • IPC: C23C014/00 C23C014/34
Facing-targets-type sputtering apparatus and method
Abstract:
Disclosed is a facing-targets-type sputtering apparatus and method capable of forming a metal film under the conditions of low gas pressure and low discharge voltage. An opening is formed in each of two facing side faces of a vacuum chamber vessel or in each of two facing side faces of a box-type discharge unit attached to an opening portion of a vacuum chamber vessel. The two openings are covered by a pair of cooling blocks. Each cooling block holds a target facing a discharge space. Magnetic field generation means is disposed so as to surround each target and operative to generate a magnetic field that surrounds a discharge space provided between the paired targets. Electron reflection means is disposed above the exposed surface of each target along the periphery of the target. A DC power and a high-frequency power are applied between the vacuum chamber vessel and the targets.
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