Invention Application
- Patent Title: Facing-targets-type sputtering apparatus and method
- Patent Title (中): 面向目标型溅射装置及方法
-
Application No.: US09998235Application Date: 2001-12-03
-
Publication No.: US20020066669A1Publication Date: 2002-06-06
- Inventor: Sadao Kadokura
- Applicant: FTS Corporation
- Applicant Address: JP Hachioji-shi
- Assignee: FTS Corporation
- Current Assignee: FTS Corporation
- Current Assignee Address: JP Hachioji-shi
- Priority: JP369655/2000 20001205
- Main IPC: C23C014/00
- IPC: C23C014/00 ; C23C014/34

Abstract:
Disclosed is a facing-targets-type sputtering apparatus and method capable of forming a metal film under the conditions of low gas pressure and low discharge voltage. An opening is formed in each of two facing side faces of a vacuum chamber vessel or in each of two facing side faces of a box-type discharge unit attached to an opening portion of a vacuum chamber vessel. The two openings are covered by a pair of cooling blocks. Each cooling block holds a target facing a discharge space. Magnetic field generation means is disposed so as to surround each target and operative to generate a magnetic field that surrounds a discharge space provided between the paired targets. Electron reflection means is disposed above the exposed surface of each target along the periphery of the target. A DC power and a high-frequency power are applied between the vacuum chamber vessel and the targets.
Public/Granted literature
- US06911123B2 Facing-targets-type sputtering apparatus and method Public/Granted day:2005-06-28
Information query