Invention Application
US20020070397A1 Contact structure for a ferroelectric memory device 有权
铁电存储器件的接触结构

Contact structure for a ferroelectric memory device
Abstract:
A contact structure for a ferroelectric memory device 13 integrated in a semiconductor substrate and includes an appropriate control circuitry and a matrix array of ferroelectric memory cells, wherein each cell includes a MOS device connected to a ferroelectric capacitor. The MOS device has first and second conduction terminals and is covered with an insulating layer. The ferroelectric capacitor has a lower plate formed on the insulating layer above the first conduction terminals and connected electrically to the latter, which lower plate is covered with a layer of a ferroelectric material and coupled capacitively to an upper plate. Advantageously, the contact structure comprises at least a plurality of plugs filled with a nonconductive material between the first conduction terminals and the ferroelectric capacitor, and comprises a plurality of plugs filled with a conductive material for the second conduction terminals or the control circuitry.
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