Invention Application
- Patent Title: Contact structure for a ferroelectric memory device
- Patent Title (中): 铁电存储器件的接触结构
-
Application No.: US09998602Application Date: 2001-11-16
-
Publication No.: US20020070397A1Publication Date: 2002-06-13
- Inventor: Raffaele Zambrano
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.I.
- Current Assignee: STMicroelectronics S.r.I.
- Current Assignee Address: IT Agrate Brianza
- Priority: EP00830762.1 20001117
- Main IPC: H01L029/94
- IPC: H01L029/94

Abstract:
A contact structure for a ferroelectric memory device 13 integrated in a semiconductor substrate and includes an appropriate control circuitry and a matrix array of ferroelectric memory cells, wherein each cell includes a MOS device connected to a ferroelectric capacitor. The MOS device has first and second conduction terminals and is covered with an insulating layer. The ferroelectric capacitor has a lower plate formed on the insulating layer above the first conduction terminals and connected electrically to the latter, which lower plate is covered with a layer of a ferroelectric material and coupled capacitively to an upper plate. Advantageously, the contact structure comprises at least a plurality of plugs filled with a nonconductive material between the first conduction terminals and the ferroelectric capacitor, and comprises a plurality of plugs filled with a conductive material for the second conduction terminals or the control circuitry.
Public/Granted literature
- US06633060B2 Contact structure for a ferroelectric memory device Public/Granted day:2003-10-14
Information query