Invention Application
- Patent Title: Assembly station for sputter shield assembly
- Patent Title (中): 溅射屏蔽组件装配站
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Application No.: US10006224Application Date: 2001-12-10
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Publication No.: US20020108567A1Publication Date: 2002-08-15
- Inventor: Wen-Ken Hu , Hsiao-Ping Hsieh , Zhi-Zhao Tai , Mark Wang
- Applicant: Mosel Vitelic Inc.
- Applicant Address: TW Hsinchu
- Assignee: Mosel Vitelic Inc.
- Current Assignee: Mosel Vitelic Inc.
- Current Assignee Address: TW Hsinchu
- Priority: TW90202234 20010214
- Main IPC: B05C011/11
- IPC: B05C011/11

Abstract:
An assembly station for a sputter shield assembly provides a work bench for assembling and disassembling the sputter shield assembly. The shield assembly has a clamp shield facing downwards to hold the shield assembly which is turned over by 180 degrees, and includes at least three bottom rim support arms for supporting the clamp shield and bearing the weight of the shield assembly, and at least three inner rim retaining arms for contacting the inner rim formed by the shield and the clamp shield. The invention provides a changed support means for holding the shield assembly on the assembly station so that one person is enough to do the assembly and disassembly of the shield assembly, and thus save manpower and operation time.
Public/Granted literature
- US06751850B2 Assembly station for sputter shield assembly Public/Granted day:2004-06-22
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