发明申请
- 专利标题: Imageable photoresist laminate
- 专利标题(中): 可成像光刻胶层压板
-
申请号: US09845037申请日: 2001-04-27
-
公开(公告)号: US20020115014A1公开(公告)日: 2002-08-22
- 发明人: Kyle Johnson , Toshifumi Komatsu , Jeremy William Peterson
- 主分类号: G03F007/012
- IPC分类号: G03F007/012
摘要:
A photosensitive laminate structure including a carrier layer and a photosensitive layer is described. The photosensitive layer includes a polymeric photosensitive resin composition containing at least one cross-linkable unit represented by the formula: 1 wherein X is an organic moity and Y is selected from the following group: 2 wherein Z is selected from at least one of lithium, sodium, potassium, ammonium, monoalkylammonium, dialkylammonium, and tetraalkylammonium.
公开/授权文献
- US06605406B2 Imageable photoresist laminate 公开/授权日:2003-08-12