发明申请
- 专利标题: MICRO-ALIGNMENT PICK-UP HEAD
- 专利标题(中): 微调对焦头
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申请号: US09789898申请日: 2001-02-20
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公开(公告)号: US20020116090A1公开(公告)日: 2002-08-22
- 发明人: Ernest H. Fischer
- 主分类号: G06F019/00
- IPC分类号: G06F019/00
摘要:
A placement robot includes a micro alignment pick-up head (MAP) to hold a component for placement on a substrate. The MAP includes a retention member that may be a vacuum pick-up nozzle for component retention and has two main parts: an upper body and a lower body. The upper body and the lower body are separated from one another by an air bearing which provides near-frictionless performance and allows the lower body a range of motion relative to the upper body. The MAP is either nullattachednull or nullloose.null Micropositioning actuators provide fine positioning in the X and/or Y directions.
公开/授权文献
- US06463359B2 Micro-alignment pick-up head 公开/授权日:2002-10-08