Invention Application
- Patent Title: Material for use in carrier and polishing pads
- Patent Title (中): 用于载体和抛光垫的材料
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Application No.: US10187643Application Date: 2002-06-27
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Publication No.: US20030003846A1Publication Date: 2003-01-02
- Inventor: Robert D. Tolles
- Main IPC: B24B049/00
- IPC: B24B049/00 ; B24B051/00
Abstract:
A material with a mesh of fibers and a binder material holding the fibers in the mesh can be used on a carrier head or a polishing pad. A polishing apparatus can include a pad cleaner with nozzles to direct jets of cleaning fluid onto the polishing pad and a brush to agitate a surface of the polishing pad.
Public/Granted literature
- US06607428B2 Material for use in carrier and polishing pads Public/Granted day:2003-08-19
Information query
