Invention Application
US20030033112A1 Method for generating a control output for a position control loop
审中-公开
用于产生位置控制回路的控制输出的方法
- Patent Title: Method for generating a control output for a position control loop
- Patent Title (中): 用于产生位置控制回路的控制输出的方法
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Application No.: US10198077Application Date: 2002-07-19
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Publication No.: US20030033112A1Publication Date: 2003-02-13
- Inventor: Sven Vogler , Roland Kaplan , Robert Weikert , Roelof Wijnaendts-Van-Resandt
- Applicant: Heidelberg Instruments Mikrotechnik GmbH
- Applicant Address: DE Heidelberg
- Assignee: Heidelberg Instruments Mikrotechnik GmbH
- Current Assignee: Heidelberg Instruments Mikrotechnik GmbH
- Current Assignee Address: DE Heidelberg
- Priority: DE10002196.4 20000119
- Main IPC: G01C009/00
- IPC: G01C009/00 ; G06F015/00 ; G01C017/00 ; G01C019/00

Abstract:
A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focussed onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focussed measuring spot is determined based on the measured values obtained by the light detector (12).
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