Invention Application
- Patent Title: Structure and method for electrical isolation of optoelectronic integrated circuits
- Patent Title (中): 光电集成电路电气隔离的结构和方法
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Application No.: US10281421Application Date: 2002-10-25
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Publication No.: US20030067009A1Publication Date: 2003-04-10
- Inventor: Christopher L. Chua , Philip D. Floyd , Thomas L. Paoli , Decai Sun
- Applicant: Xerox Corporation
- Applicant Address: null
- Assignee: Xerox Corporation
- Current Assignee: Xerox Corporation
- Current Assignee Address: null
- Main IPC: H01L027/15
- IPC: H01L027/15
Abstract:
Semiconductor devices in an optoelectronic integrated circuit are electrically isolated from each other by using planar lateral oxidation to oxidize a buried semiconductor layer vertically separating the semiconductor devices.
Public/Granted literature
- US07195939B2 Structure and method for electrical isolation of optoelectronic integrated circuits Public/Granted day:2007-03-27
Information query
