Invention Application
US20030071012A1 Method of manufacturing a micro-electromechanical fluid ejecting device 失效
微机电流体喷射装置的制造方法

  • Patent Title: Method of manufacturing a micro-electromechanical fluid ejecting device
  • Patent Title (中): 微机电流体喷射装置的制造方法
  • Application No.: US10302604
    Application Date: 2002-11-23
  • Publication No.: US20030071012A1
    Publication Date: 2003-04-17
  • Inventor: Kia Silverbrook
  • Priority: AUPP0872 19971212; AUPO7991 19970715
  • Main IPC: C23F001/00
  • IPC: C23F001/00
Method of manufacturing a micro-electromechanical fluid ejecting device
Abstract:
A method of manufacturing a micro-electromechanical fluid ejecting device includes the step of forming a plurality of nozzle chambers on a wafer substrate. Sacrificial layers are deposited on the wafer substrate. A plurality of fluid ejecting mechanisms is formed on the sacrificial layers to be operatively positioned with respect to the nozzle chambers. The sacrificial layers are etched to free the fluid ejecting mechanisms. The fluid ejecting mechanisms are formed so that they are capable of ejecting fluid through both of a pair of fluid ejection ports defined in a roof of each nozzle chamber on one cycle of operation of the fluid ejecting mechanism.
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