The invention provides a method of passivating an optical fiber or preform by reducing a hydrogen content in the fiber or preform using a deuterium ion plasma passivation process or a high temperature deuterium gas passivation of preforms for exchanging at least a portion of the hydrogen contained within the optical fiber or preform with deuterium. The deuterium plasma is generated from a deuterium gas. To further reduce the passivation, the optical fiber or preform are heated in the deuterium plasma. If desired, the deuterium plasma is applied to an inner wall of a preform tube before collapsing the preform tube into a preform rod.