Invention Application
- Patent Title: Exposure method for liquid crystal display device
- Patent Title (中): 液晶显示装置的曝光方法
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Application No.: US10319721Application Date: 2002-12-16
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Publication No.: US20030124443A1Publication Date: 2003-07-03
- Inventor: Hun Jeoung
- Applicant: LG.PHILIPS LCD CO., LTD.
- Applicant Address: null
- Assignee: LG.PHILIPS LCD CO., LTD.
- Current Assignee: LG.PHILIPS LCD CO., LTD.
- Current Assignee Address: null
- Priority: KRP2001-86064 20011227
- Main IPC: G03F007/22
- IPC: G03F007/22

Abstract:
An exposure method for a liquid crystal display devices formed as a plurality of unit panels on a large-sized sheet of glass using a stepper includes the steps of recording benchmark measurements of the large-sized sheet of glass, determining a change in dimension of the large-sized sheet of glass prior to a stepper positioning and exposing a mask on at least one unit panel of the plurality of unit panels, and compensating for the change in dimension by changing a position of an exposure for the at least one unit panel to a position other than where the stepper had previously exposed the at least one unit panel with a first mask.
Public/Granted literature
- US06733937B2 Exposure method for liquid crystal display device Public/Granted day:2004-05-11
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