Invention Application
US20030124443A1 Exposure method for liquid crystal display device 有权
液晶显示装置的曝光方法

Exposure method for liquid crystal display device
Abstract:
An exposure method for a liquid crystal display devices formed as a plurality of unit panels on a large-sized sheet of glass using a stepper includes the steps of recording benchmark measurements of the large-sized sheet of glass, determining a change in dimension of the large-sized sheet of glass prior to a stepper positioning and exposing a mask on at least one unit panel of the plurality of unit panels, and compensating for the change in dimension by changing a position of an exposure for the at least one unit panel to a position other than where the stepper had previously exposed the at least one unit panel with a first mask.
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