发明申请
- 专利标题: Methods for making multiple seed layers for metallic interconnects
- 专利标题(中): 制造金属互连多种子层的方法
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申请号: US10328629申请日: 2002-12-23
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公开(公告)号: US20030129828A1公开(公告)日: 2003-07-10
- 发明人: Uri Cohen
- 主分类号: H01L021/4763
- IPC分类号: H01L021/4763
摘要:
One embodiment of the present invention is a method for making metallic interconnects, which method is utilized at a stage of processing a substrate having a patterned insulating layer which includes at least one opening and a field surrounding the at least one opening, the field and the at least one opening being ready for depositing of one or more seed layers, which method includes steps of: (a) depositing a substantially conformal seed layer over the field and inside surfaces of the at least one opening; (b) depositing a substantially non-conformal seed layer over the substantially conformal seed layer, said substantially non-conformal seed layer being thicker than said substantially conformal seed layer over the field, wherein the substantially conformal and the substantially non-conformal seed layers do not seal the at least one opening; and (c) electroplating a metallic layer over the substantially non-conformal seed layer, wherein the electroplated metallic layer comprises a material selected from a group consisting of Cu, Ag, or alloys comprising one or more of these metals.
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