Invention Application
- Patent Title: Polishing apparatus
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Application No.: US10339250Application Date: 2003-01-09
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Publication No.: US20030129925A1Publication Date: 2003-07-10
- Inventor: Yoshiaki Toyoshima , Hideo Toriumi , Shin-ichiro Taguchi
- Priority: JP002244/2002 20020109; JP032055/2002 20020208; JP138105/2002 20020514; JP196007/2002 20020704
- Main IPC: B24B049/00
- IPC: B24B049/00 ; B24B051/00

Abstract:
A polishing apparatus includes a polishing jig. The polishing jig includes an elastic balloon member, a fixture, and a fluid supply portion. The fixture airtightly closes the rear opening portion of the balloon member. The fluid supply portion supplies a fluid into a space formed by the fixture and balloon member. The balloon member has a cup shape constructed by a dome portion and a cylinder portion extending backward from the outer periphery of the dome portion. The fixture fixes the opening portion of the cylinder portion of the balloon member.
Public/Granted literature
- US06932678B2 Polishing apparatus Public/Granted day:2005-08-23
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