发明申请
- 专利标题: Thermoelectric microactuator
- 专利标题(中): 热电微型致动器
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申请号: US10109074申请日: 2002-03-28
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公开(公告)号: US20030183267A1公开(公告)日: 2003-10-02
- 发明人: Thomas J. McIntyre , Andrew TS Pomerene
- 申请人: BAE SYSTEMS Information & Electronic Systems Integration Inc.
- 申请人地址: null
- 专利权人: BAE SYSTEMS Information & Electronic Systems Integration Inc.
- 当前专利权人: BAE SYSTEMS Information & Electronic Systems Integration Inc.
- 当前专利权人地址: null
- 主分类号: H01L035/02
- IPC分类号: H01L035/02 ; H01L035/28 ; H01L035/16
摘要:
A thermoelectric microactuator on a substrate includes a first temperature control element having a first surface bonded to the substrate and having a second surface. A first electrically nonconductive layer has a first surface bonded to the second surface of the first temperature control element and has a second surface. An actuator arm includes a first region bonded to the second surface of the first nonconductive layer and includes a flexure contiguously extending from the first region to an end cantilevered beyond the first nonconductive layer and forming an axis at the junction of the flexure and the first region. The first temperature control element controls the temperature of the actuator arm to thereby deflect the flexure about the axis.
公开/授权文献
- US06756536B2 Thermoelectric microactuator 公开/授权日:2004-06-29
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