发明申请
US20030204488A1 Management system, management method and apparatus, and management apparatus control method 失效
管理系统,管理方法和设备,以及管理设备控制方法

Management system, management method and apparatus, and management apparatus control method
摘要:
A system which manages a plurality of semiconductor exposure apparatuses holds TIS information representing the characteristics of the respective semiconductor exposure apparatuses. In a semiconductor exposure apparatus, a parameter value is optimized on the basis of AGA measurement results obtained using a set parameter value and another parameter value and AGA measurement estimation results obtained by virtually changing the parameter value. Whether to reflect the optimized parameter value in another industrial device is decided on the basis of the TIS information. If it is decided to reflect the optimized parameter value, the parameter value of another semiconductor exposure apparatus is optimized by the optimized parameter value. In this manner, the optimization result of a parameter value by a given industrial device can be properly reflected in another industrial device, realizing efficient parameter value setting.
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