Invention Application
US20040037347A1 OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL
失效
RTP工具温度测量系统的光学路径改进,聚焦长度变化补偿和轻量化减轻
- Patent Title: OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL
- Patent Title (中): RTP工具温度测量系统的光学路径改进,聚焦长度变化补偿和轻量化减轻
-
Application No.: US10225590Application Date: 2002-08-22
-
Publication No.: US20040037347A1Publication Date: 2004-02-26
- Inventor: Douglas Brown , Robert David Meadows , David Tao , Mathias Koch
- Main IPC: G01J005/00
- IPC: G01J005/00

Abstract:
The present invention is directed to a pyrometer system and comprises an elevator tube. The elevator tube comprises an inner tube and an outer tube surrounding the inner tube in telescoping arrangement and extending from a top to a bottom thereof, the arrangement defining a fluid passageway therebetween. The elevator tube further comprises a port associated with the outer tube that is operable to transmit a cooling gas therethrough into the fluid passageway. A pyrometer head is coupled to the bottom of the inner tube and is operable to transmit and receive radiation through the inner tube. The system further comprises a spider collar coupled to at least one of a top of the inner tube or outer tube, and is operable to support a work piece for thermal measurement thereof.
Public/Granted literature
Information query