Invention Application
US20040037347A1 OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL 失效
RTP工具温度测量系统的光学路径改进,聚焦长度变化补偿和轻量化减轻

  • Patent Title: OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL
  • Patent Title (中): RTP工具温度测量系统的光学路径改进,聚焦长度变化补偿和轻量化减轻
  • Application No.: US10225590
    Application Date: 2002-08-22
  • Publication No.: US20040037347A1
    Publication Date: 2004-02-26
  • Inventor: Douglas BrownRobert David MeadowsDavid TaoMathias Koch
  • Main IPC: G01J005/00
  • IPC: G01J005/00
OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL
Abstract:
The present invention is directed to a pyrometer system and comprises an elevator tube. The elevator tube comprises an inner tube and an outer tube surrounding the inner tube in telescoping arrangement and extending from a top to a bottom thereof, the arrangement defining a fluid passageway therebetween. The elevator tube further comprises a port associated with the outer tube that is operable to transmit a cooling gas therethrough into the fluid passageway. A pyrometer head is coupled to the bottom of the inner tube and is operable to transmit and receive radiation through the inner tube. The system further comprises a spider collar coupled to at least one of a top of the inner tube or outer tube, and is operable to support a work piece for thermal measurement thereof.
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