Invention Application
- Patent Title: Extended kalman filter incorporating offline metrology
- Patent Title (中): 扩展卡尔曼滤波器结合离线计量
-
Application No.: US10232854Application Date: 2002-08-28
-
Publication No.: US20040043700A1Publication Date: 2004-03-04
- Inventor: Jim Hofmann
- Main IPC: B24B049/00
- IPC: B24B049/00 ; B24B051/00

Abstract:
An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.
Public/Granted literature
- US07087527B2 Extended kalman filter incorporating offline metrology Public/Granted day:2006-08-08
Information query