Invention Application
US20040067717A1 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
有权
具有可调节压力区和障碍物的工件载体以及对工件进行平面化的方法
- Patent Title: Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
- Patent Title (中): 具有可调节压力区和障碍物的工件载体以及对工件进行平面化的方法
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Application No.: US10672017Application Date: 2003-09-26
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Publication No.: US20040067717A1Publication Date: 2004-04-08
- Inventor: Nikolay N. Korovin , Stephen C. Schultz , John D. Herb , James L. Farmer
- Main IPC: B24B049/00
- IPC: B24B049/00 ; B24B051/00 ; B24B001/00

Abstract:
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
Public/Granted literature
- US07014541B2 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Public/Granted day:2006-03-21
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