发明申请
US20040081546A1 Method and apparatus for supplying substrates to a processing tool
审中-公开
用于将基材供给到加工工具的方法和装置
- 专利标题： Method and apparatus for supplying substrates to a processing tool
- 专利标题（中）： 用于将基材供给到加工工具的方法和装置
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申请号： US10650479申请日： 2003-08-28
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公开(公告)号： US20040081546A1公开(公告)日： 2004-04-29
- 发明人: Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： null
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： null
- 主分类号： B65H001/00
- IPC分类号： B65H001/00
摘要：
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
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