发明申请
US20040088068A1 Method and apparatus for providing first-principles feed-forward manufacturing control
审中-公开
用于提供第一原理前馈制造控制的方法和装置
- 专利标题： Method and apparatus for providing first-principles feed-forward manufacturing control
- 专利标题（中）： 用于提供第一原理前馈制造控制的方法和装置
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申请号： US10284969申请日： 2002-10-31
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公开(公告)号： US20040088068A1公开(公告)日： 2004-05-06
- 发明人: Daniel Kadosh
- 主分类号： G06F019/00
- IPC分类号： G06F019/00
摘要：
A method includes processing a workpiece in a manufacturing system including a plurality of tools. Workpiece fabrication data related to the processing is retrieved. Future processing in the manufacturing system is simulated based on the workpiece fabrication data. At least one process parameter for the future processing is predicted based on the simulating. The workpiece is processed in at least one of the tools based on the predicted process parameter. A system includes a plurality of tools configured to process a workpiece and a simulation unit. The simulation unit is configured to retrieve workpiece fabrication data related to the processing, simulate future processing for the workpiece based on the workpiece fabrication data, and predict at least one process parameter for the future processing based on the simulating, wherein at least one of the tools is configured to process the workpiece based on the predicted process parameter.