发明申请
- 专利标题: Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
- 专利标题(中): 用于检测金属层化学机械抛光终点的方法和装置
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申请号: US10722716申请日: 2003-11-25
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公开(公告)号: US20040116047A1公开(公告)日: 2004-06-17
- 发明人: Andreas Norbert Wiswesser , Judon Tony Pan , Boguslaw Swedek
- 申请人: Applied Materials, Inc., a Delaware corporation
- 申请人地址: null
- 专利权人: Applied Materials, Inc., a Delaware corporation
- 当前专利权人: Applied Materials, Inc., a Delaware corporation
- 当前专利权人地址: null
- 主分类号: B24B049/00
- IPC分类号: B24B049/00
摘要:
An apparatus, as well as a method, determines an endpoint of chemical mechanical polishing a metal layer on a substrate. The method of the apparatus includes bringing a surface of a substrate into contact with a polishing pad that has a window; causing relative motion between the substrate and the polishing pad; directing a light beam through the window, the motion of the polishing pad relative to the substrate causing the light beam to move in a path across the substrate; detecting light beam reflections from the substrate and a retaining ring; generating reflection data associated with the light beam reflections; dividing the reflection data into a plurality of radial ranges; and identifying the predetermined pattern from the reflection data in the plurality of radial ranges to establish the endpoint.
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