Invention Application
- Patent Title: Load cup for chemical mechanical polishing
- Patent Title (中): 负载杯用于化学机械抛光
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Application No.: US10621303Application Date: 2003-07-16
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Publication No.: US20040127142A1Publication Date: 2004-07-01
- Inventor: Donald J.K. Olgado
- Applicant: Applied Materials, Inc.
- Applicant Address: null
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: null
- Main IPC: B24B049/00
- IPC: B24B049/00 ; B24B051/00 ; B24B019/00

Abstract:
A load cup for transferring a substrate in a chemical mechanical polishing system is provided. In one embodiment, a load cup for transferring substrates in a chemical mechanical polishing system includes a substrate support having a first side adapted to support a substrate thereon and at least one actuator coupled to the substrate support and adapted to move the substrate support laterally. In another embodiment, a method for transferring a substrate between a polishing head and a load cup includes sensing a position of the polishing head relative to the load cup and automatically aligning the load cup and polishing head in response to the sensed relative position.
Public/Granted literature
- US07101253B2 Load cup for chemical mechanical polishing Public/Granted day:2006-09-05
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