Invention Application
US20040171761A1 Silicone hyper-branched polymer surfactant, method of preparing the same and method of rinsing using a rinsing solution comprising the same
失效
硅氧烷超支化聚合物表面活性剂，其制备方法和使用包含其的漂洗溶液进行漂洗的方法
- Patent Title: Silicone hyper-branched polymer surfactant, method of preparing the same and method of rinsing using a rinsing solution comprising the same
- Patent Title (中): 硅氧烷超支化聚合物表面活性剂，其制备方法和使用包含其的漂洗溶液进行漂洗的方法
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Application No.: US10780865Application Date: 2004-02-19
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Publication No.: US20040171761A1Publication Date: 2004-09-02
- Inventor: Kyoung-Mi Kim , Jae-Ho Kim , Young-Ho Kim , Sang-Woong Yoon , Boo-Deuk Kim , Shi-Yong Lee
- Priority: KR2003-12825 20030228
- Main IPC: C08G077/00
- IPC: C08G077/00 ; C08G085/00
Abstract:
A silicone hyper-branched polymer surfactant is included in a rinsing solution which may be used to remove photoresist residues. The silicone hyper-branched polymer surfactant is prepared by polymerizing a monomer represented by the following chemical formula (1), where R1 denotes a vinyl group and R2 denotes hydrogen, and includes both a hydrophobic group and a hydrophilic group. 1
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