METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS

Invention Application

US20040176015A1 METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS 失效

Title translation: 确定平面化过程的端点的方法

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Patent Title: METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS
Patent Title (中): 确定平面化过程的端点的方法
Application No.: US10248950

Application Date: 2003-03-05
Publication No.: US20040176015A1

Publication Date: 2004-09-09
Inventor: Peter Lahnor , Olaf Kuehn , Andreas Roemer , Alexander Simpson
Main IPC: B24B049/00
IPC: B24B049/00 ; B24B051/00

METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS

Abstract:

A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.

Abstract(Chinese):

公开了一种确定平坦化工艺终点的方法。端点检测信号从在平坦化网上限定的平坦化区域内的至少一个预定位置选择性地采样。当检测到基于端点检测信号的端点标准时，停止平面化。

Public/Granted literature

US06932674B2 Method of determining the endpoint of a planarization process Public/Granted day:2005-08-23

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