发明申请
- 专利标题： Polishing pad with a partial adhesive coating
- 专利标题（中）： 抛光垫，部分粘合剂涂层
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申请号： US10686354申请日： 2003-10-14
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公开(公告)号： US20040198187A1公开(公告)日： 2004-10-07
- 发明人: Robert D. Tolles
- 申请人： Applied Materials, Inc., a Delaware corporation
- 申请人地址： null
- 专利权人： Applied Materials, Inc., a Delaware corporation
- 当前专利权人： Applied Materials, Inc., a Delaware corporation
- 当前专利权人地址： null
- 主分类号： B24B001/00
- IPC分类号： B24B001/00
摘要：
A method for selectively altering a polishing pad adhesive layer includes providing a mask having transparent regions and opaque regions and directing radiation toward the mask so that the radiation passes through the transparent regions and impinges onto the adhesive layer on the polishing pad. The area of the adhesive layer corresponding to the transparent regions of the mask is cured to be less adhesive. The area of the adhesive layer corresponding to the opaque regions remain adhesive.
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