Invention Application
- Patent Title: Scanning probe microscopy probe and method for scanning probe contact printing
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Application No.: US10670585Application Date: 2003-09-25
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Publication No.: US20040227075A1Publication Date: 2004-11-18
- Inventor: Chang Liu , Jun Zou , Xuefeng Wang , David Bullen
- Main IPC: G01N023/00
- IPC: G01N023/00 ; B05D005/00 ; B29C059/00 ; B29C033/76

Abstract:
A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
Public/Granted literature
- US07081624B2 Scanning probe microscopy probes and methods Public/Granted day:2006-07-25
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