发明申请
US20040251772A1 Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method
失效
同轴柔性压电电缆偏振器,偏振方法,缺陷检测器和缺陷检测方法
- 专利标题: Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method
- 专利标题(中): 同轴柔性压电电缆偏振器,偏振方法,缺陷检测器和缺陷检测方法
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申请号: US10485491申请日: 2004-01-30
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公开(公告)号: US20040251772A1公开(公告)日: 2004-12-16
- 发明人: Mitsuo Ebisawa , Takeshi Nagai , Tooru Sugimori
- 优先权: JP2001-234553 20010802; JP2001-234554 20010802; JP2001-234555 20010802; JP2001-381350 20011214
- 主分类号: H01L041/08
- IPC分类号: H01L041/08
摘要:
The invention provides a defect inspecting apparatus and a defect detecting method for specifying a position of a defect before polarization when the defect is included in a coaxial flexible piezoelectric member. Further, when a piezoelectric tube is moved in polarization, a friction force is produced between the coaxial flexible piezoelectric member and a block-like conductor and therefore, a large force is needed in moving the piezoelectric tube. The invention provides a polarizing apparatus and a polarizing method capable of moving the piezoelectric tube even by a small force. There are provided a defect detecting apparatus of a coaxial flexible piezoelectric member having a constitution of applying a direct current to a coaxial flexible piezoelectric member while moving a piezoelectric tube arranged at a hole of inspecting electrode means and a marking apparatus for marking a defect portion. Thereby, when a defect is present at a portion thereof arranged at the hole of the inspecting electrode means, electricity is discharged at the defect portion and therefore, the defect portion can be specified and the mark can be attached to the defect portion. Further, a conductive block provided with a path portion of the piezoelectric tube is divided. By dividing the block-like conductor by a plural number, a friction force between the block-like conductor per divided one and the piezoelectric tube is reduced. Further, the piezoelectric tube can be moved by a small force by a pulley arranged at a fold back portion of the piezoelectric tube.
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