发明申请
- 专利标题： Contact pressure sensor and method for manufacturing the same
- 专利标题（中）： 接触式压力传感器及其制造方法
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申请号： US10615413申请日： 2003-07-08
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公开(公告)号： US20050007721A1公开(公告)日： 2005-01-13
- 发明人: Ramam Akkipeddi , Christopher Sperring , Siew Toh , Cho Tay , Mustafizur Rahman , Soo Chua
- 申请人： Ramam Akkipeddi , Christopher Sperring , Siew Toh , Cho Tay , Mustafizur Rahman , Soo Chua
- 主分类号： G01L1/22
- IPC分类号： G01L1/22 ; H01H47/12
摘要：
A contact pressure sensor (10) and method for manufacturing a contact pressure sensor for detecting contact pressure between two surfaces is disclosed. The contact pressure sensor disclosed comprises a substrate (40) for supporting the sensor and a contact pressure sensitive layer (26) sensitive to pressure applied to the contact pressure sensor. The method disclosed also comprises transferring a process post structure (8) that is formed on a first process support substrate (20) from the first process support substrate to a second contact pressure sensor support substrate (40).