发明申请
- 专利标题: Wafer bonding hermetic encapsulation
- 专利标题(中): 晶圆粘合气密封装
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申请号: US10913357申请日: 2004-08-09
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公开(公告)号: US20050009246A1公开(公告)日: 2005-01-13
- 发明人: Paul Enquist , Qin-Yi Tong , Gaius Fountain , Robert Markunas
- 申请人: Paul Enquist , Qin-Yi Tong , Gaius Fountain , Robert Markunas
- 申请人地址: US NC Morrisville
- 专利权人: Ziptronix, Inc.
- 当前专利权人: Ziptronix, Inc.
- 当前专利权人地址: US NC Morrisville
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; H01L21/50 ; H01L23/10 ; H01L21/44
摘要:
A method for providing encapsulation of an electronic device which obtains an encapsulating member configured to enclose the electronic device, prepares a surface of the encapsulating member for non-adhesive direct bonding, prepares a surface of a device carrier including the electronic device for non-adhesive direct bonding, and bonds the prepared surface of the encapsulating member to the prepared surface of the device carrier to form an encapsulation of the electronic device. As such, an encapsulated electronic device results which includes the device carrier having a first bonding region encompassing the electronic device, includes the encapsulating member having at least one relief preventing contact between the electronic device and the encapsulating member and having a second bonding region bonded to the first bonding region of the device carrier, and includes a non-adhesive direct bond formed between the first and second bonding regions thereby to form an encapsulation of the electronic device. The encapsulated electronic device can be an electronic or optoelectronic device.
公开/授权文献
- US07622324B2 Wafer bonding hermetic encapsulation 公开/授权日:2009-11-24
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