发明申请
- 专利标题: Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use
- 专利标题(中): 使用形成为集成电路的压电致动器的变形镜和使用方法
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申请号: US10629798申请日: 2003-07-30
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公开(公告)号: US20050023573A1公开(公告)日: 2005-02-03
- 发明人: Pradeep Govil , Andrew Guzman
- 申请人: Pradeep Govil , Andrew Guzman
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 主分类号: G02B5/10
- IPC分类号: G02B5/10 ; G02B5/08 ; G02B26/08 ; H01L21/027
摘要:
A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
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