Provided is an electrophotographic photosensitive member having a photoconductive layer on an electrically conductive substrate, the photoconductive layer being formed from a non-single-crystal material constituted by at least silicon atoms as a base material, and a non-single-crystal layer region constituted by silicon atoms and carbon atoms as base materials, the non-single-crystal layer region being laminated on the photoconductive layer, in which the content distribution of the oxygen atoms to a total amount of component atoms in a thickness direction within the non-single-crystal layer region has a peak.