发明申请
US20050030545A1 Method and apparatus for compact Fabry-Perot imaging spectrometer
有权
紧凑法布里 - 珀罗成像光谱仪的方法和装置
- 专利标题: Method and apparatus for compact Fabry-Perot imaging spectrometer
- 专利标题(中): 紧凑法布里 - 珀罗成像光谱仪的方法和装置
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申请号: US10893230申请日: 2004-07-19
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公开(公告)号: US20050030545A1公开(公告)日: 2005-02-10
- 发明人: David Tuschel , Patrick Treado , Chenhui Wang
- 申请人: David Tuschel , Patrick Treado , Chenhui Wang
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J20060101 ; G01J3/02 ; G01J3/10 ; G01J3/28 ; G01J3/30 ; G01J3/44 ; G01N21/64 ; G01N21/65 ; G02F1/1333 ; G02F1/1335 ; G02F1/1347
摘要:
The disclosure generally relates to a method and apparatus for compact Fabry-Perot imaging spectrometer. More specifically, in one embodiment, the disclosure concerns a tunable Fabry-Perot optical filter for providing a spatially accurate wavelength-resolved image of a sample having two spatial dimensions. The optical filter may include plural filter elements having an initial predetermined spacing between adjacent filter elements; and a micro electromechanical system (“MEMS”) actuator. One of the plural filter elements may be attached to the MEMS actuator so that the actuator is capable of moving said one filter element relative to another of said plural filter elements to thereby tune said Fabry-Perot optical filter.
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