发明申请
- 专利标题: Aberration correction optical system
- 专利标题(中): 畸变校正光学系统
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申请号: US10936797申请日: 2004-09-09
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公开(公告)号: US20050030638A1公开(公告)日: 2005-02-10
- 发明人: Toshiyuki Yoshihara
- 申请人: Toshiyuki Yoshihara
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP342385/1998(PAT.) 19981116
- 主分类号: G02B27/00
- IPC分类号: G02B27/00 ; G03F7/20 ; G02B13/08 ; G02B17/00
摘要:
An aberration changing optical system to be used with a projection optical system of a projection exposure apparatus, includes an optical element having at least one of a cylindrical surface and a toric surface and being rotatable about and tiltable to an optical axis of the optical system. In another form, the aberration changing optical system includes an optical element having different refracting powers in two orthogonal directions or having a refracting power only in one direction, the optical element being made rotatable about and tiltable to an optical axis of the optical system.
公开/授权文献
- US06987621B2 Aberration correction optical system 公开/授权日:2006-01-17
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