发明申请
US20050035671A1 Method of forming a micro-rotating device, and a micro-rotating device produced by the method
有权
形成微型旋转装置的方法以及通过该方法制造的微型旋转装置
- 专利标题： Method of forming a micro-rotating device, and a micro-rotating device produced by the method
- 专利标题（中）： 形成微型旋转装置的方法以及通过该方法制造的微型旋转装置
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申请号： US10915142申请日： 2004-08-10
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公开(公告)号： US20050035671A1公开(公告)日： 2005-02-17
- 发明人: Akio Takada , Ching Yeo , Jianmin Miao
- 申请人： Akio Takada , Ching Yeo , Jianmin Miao
- 优先权： SGSG200304381-7 20030812
- 主分类号： B81B5/00
- IPC分类号： B81B5/00 ; B81C3/00 ; H02K15/02 ; H02K11/00
摘要：
A micro-rotating device has a rotor 200 (of diameter not more than 1.5 cm), a shaft 202 threaded through the rotor 200, and a shaft holder 207 for holding the shaft. The shaft holders are formed by etching an Si substrate 501 to form multiple shaft receiving openings 508. The rotors and shafts too are formed from respective Si substrates 301, 401. The rotors 200 are located over the shaft holders 207, and the shafts threaded through the rotors 200 into the openings 509 and attached there by a wafer bonding process. Then the substrate 501 is partitioned to give individual motor elements. Protrusions 206 extend from the rotor in the direction towards the stator to space the rotor from the shaft holder.