Invention Application
US20050040484A1 MEM switching device and method for making same 失效
MEM开关器件及其制造方法

  • Patent Title: MEM switching device and method for making same
  • Patent Title (中): MEM开关器件及其制造方法
  • Application No.: US10689167
    Application Date: 2003-10-20
  • Publication No.: US20050040484A1
    Publication Date: 2005-02-24
  • Inventor: Heinz Busta
  • Applicant: Heinz Busta
  • Main IPC: H01H1/00
  • IPC: H01H1/00 H01L27/14
MEM switching device and method for making same
Abstract:
A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.
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