Invention Application
- Patent Title: MEM switching device and method for making same
- Patent Title (中): MEM开关器件及其制造方法
-
Application No.: US10689167Application Date: 2003-10-20
-
Publication No.: US20050040484A1Publication Date: 2005-02-24
- Inventor: Heinz Busta
- Applicant: Heinz Busta
- Main IPC: H01H1/00
- IPC: H01H1/00 ; H01L27/14

Abstract:
A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.
Public/Granted literature
- US07317232B2 MEM switching device Public/Granted day:2008-01-08
Information query