Invention Application
US20050045977A1 REPEATED STRUCTURE OF NANOMETER THIN FILMS WITH SYMMETRIC OR ASYMMETRIC CONFIGURATION FOR SPR SIGNAL MODULATION
有权
具有SPR信号调制的对称或非对称配置的纳米薄膜的重复结构
- Patent Title: REPEATED STRUCTURE OF NANOMETER THIN FILMS WITH SYMMETRIC OR ASYMMETRIC CONFIGURATION FOR SPR SIGNAL MODULATION
- Patent Title (中): 具有SPR信号调制的对称或非对称配置的纳米薄膜的重复结构
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Application No.: US10647229Application Date: 2003-08-26
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Publication No.: US20050045977A1Publication Date: 2005-03-03
- Inventor: Chii-Wann Lin , Chen Huang , Shiming Lin , Chih Lee , Peizen Chang , Shu Lee
- Applicant: Chii-Wann Lin , Chen Huang , Shiming Lin , Chih Lee , Peizen Chang , Shu Lee
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01N21/75 ; G01N21/77 ; G02B6/122 ; H01L31/00 ; H01L33/00
Abstract:
A symmetric or asymmetric multilayer structure based on the technique of surface plasmon resonance (SPR) has been applied for modulation of resonant angle and wavelength. The fabrication of this invention can have nanoscale thin film layers up to several hundreds, while each layer has its own material of a high or low refractive index value, and the total layers in a thickness of tens to hundreds nanometers are grown in this single structure. This invention is intended for optimizing the scanning of mechanism by modulating SPR resonant angle and wavelength, and for developing the prospect of portable instruments.
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