发明申请
- 专利标题: Laminated structure, piezoelectric actuator and method of manufacturing the same
- 专利标题(中): 层压结构,压电致动器及其制造方法
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申请号: US10928148申请日: 2004-08-30
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公开(公告)号: US20050046312A1公开(公告)日: 2005-03-03
- 发明人: Tetsu Miyoshi
- 申请人: Tetsu Miyoshi
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JP2003-308880 20030901
- 主分类号: H01L41/047
- IPC分类号: H01L41/047 ; H01L41/083 ; H01L41/24
摘要:
A laminated structure having an electrode hard to peel off and a method of manufacturing the laminated structure. The laminated structure has: a backing substrate; a lower electrode including an adhesive layer containing a metal oxide and a conductive layer formed on the backing substrate with the adhesive layer therebetween; a dielectric layer disposed on the lower electrode; and an upper electrode disposed on the dielectric layer. Further, the method includes the steps of: (a) disposing a lower electrode by forming a conductive layer on a backing substrate with an adhesive layer containing a metal oxide therebetween; (b) disposing a dielectric layer by spraying powder of a dielectric material to the lower electrode for deposition; (c) heat-treating the dielectric layer; and (d) forming an upper electrode on the dielectric layer before or after step (c).
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